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Proceedings Paper

Performance study on thin resist for advanced reticle fabrication
Author(s): Hideo Kobayashi; Takao Higuchi; Keishi Asakawa; Yasunori Yokoya
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Paper Abstract

In this paper we discuss advantages and disadvantages of super-thin resist coatings for both e-beam and laser applications. First, we verify advantages of super-thin ZEP7000, particularly evaluating the hole-pattern linearity. Second, we discuss disadvantages of super-thin ZEP7000, including pinhole defect risks. Finally, we examine advantages and disadvantages of super-thin laser resist coatings.

Paper Details

Date Published: 3 February 2000
PDF: 9 pages
Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); doi: 10.1117/12.377112
Show Author Affiliations
Hideo Kobayashi, HOYA Corp. (Japan)
Takao Higuchi, HOYA Corp. (Japan)
Keishi Asakawa, HOYA Corp. (Japan)
Yasunori Yokoya, HOYA Corp. (Japan)


Published in SPIE Proceedings Vol. 3996:
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Uwe F. W. Behringer, Editor(s)

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