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Proceedings Paper

Precision laser processing of optical microstructures with slab waveguide CO2 lasers
Author(s): Howard J. Baker; Gavin A. J. Markillie; P. Field; Quisheng Cao; C. Janke; Denis R. Hall
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Paper Abstract

High precision laser direct writing of two types of micro- optical structure is demonstrated using a workstation built around a commercial CO2 slab waveguide laser. Drift and fluctuations in beam pointing, beam shape and pulse energy are quantified, providing an understanding of the precision capabilities. Quartz glass ablation by waveguide laser pulses of width in the 20 to 60 microsecond range has been characterized and a refractive microlens machined, involving material removal to a depth of 70 micrometer. Surface structures in aluminum with 143 micrometer lattice spacing have been produced to act as two dimensional photonic bandgap devices, modifying the transmission properties of hollow planar waveguides in the mid-infrared.

Paper Details

Date Published: 7 February 2000
PDF: 10 pages
Proc. SPIE 3888, High-Power Lasers in Manufacturing, (7 February 2000); doi: 10.1117/12.377073
Show Author Affiliations
Howard J. Baker, Heriot-Watt Univ. (United Kingdom)
Gavin A. J. Markillie, Heriot-Watt Univ. (United Kingdom)
P. Field, Heriot-Watt Univ. (United Kingdom)
Quisheng Cao, Heriot-Watt Univ. (United Kingdom)
C. Janke, Heriot-Watt Univ. (United Kingdom)
Denis R. Hall, Heriot-Watt Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 3888:
High-Power Lasers in Manufacturing
Xiangli Chen; Tomoo Fujioka; Akira Matsunawa, Editor(s)

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