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Proceedings Paper

Optical properties of ZnSe diffractive optical elements for spot array generation
Author(s): Keiji Fuse; Keiji Ebata; Takeshi Okada; Kenichi Kurisu; Manabu Shiozaki
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Paper Abstract

The diffractive optical element (DOE) is a revolutionary technology for sophisticated optical systems. It has recently been launched within the optical industry, which is constantly seeking improvements over conventional optics. We have designed and fabricated three types of binary-phase DOE and a 4-level phase DOE for spot array generation. The surface relief of a ZnSe substrate was patterned and etched with each intended phase distribution by using photolithography and reactive ion etching (RIE) technologies. The optical properties of anti-reflection coated samples were then examined by measuring the intensity distribution of the converging beams and the results compared with the calculated beam propagation.

Paper Details

Date Published: 7 February 2000
PDF: 12 pages
Proc. SPIE 3888, High-Power Lasers in Manufacturing, (7 February 2000); doi: 10.1117/12.377058
Show Author Affiliations
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)
Takeshi Okada, Sumitomo Electric Industries, Ltd. (Japan)
Kenichi Kurisu, Sumitomo Electric Industries, Ltd. (Japan)
Manabu Shiozaki, Sumitomo Electric Industries, Ltd. (Japan)


Published in SPIE Proceedings Vol. 3888:
High-Power Lasers in Manufacturing
Xiangli Chen; Tomoo Fujioka; Akira Matsunawa, Editor(s)

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