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Proceedings Paper

Micromachining of a three-dimensional submillimeter structure using an ultraviolet high-power laser and a five-axis stage
Author(s): Yoshiyuki Kawamura
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Paper Abstract

We have been developed a micromachining system which is composed of a pulsed ultraviolet laser and a five axis mechanical stage. Micro windmill which was composed of a windmill and a bearing and has been successfully fabricated as an example of the most simple mechanical element. The material was polyimide and the typical length was about 1 mm. Taking the advantages of the size effect, we have successfully obtained the maximum number of rotation of about 90,000 rpm by blowing Nitrogen gas from a small nozzle.

Paper Details

Date Published: 7 February 2000
PDF: 8 pages
Proc. SPIE 3888, High-Power Lasers in Manufacturing, (7 February 2000); doi: 10.1117/12.377027
Show Author Affiliations
Yoshiyuki Kawamura, Fukuoka Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 3888:
High-Power Lasers in Manufacturing
Xiangli Chen; Tomoo Fujioka; Akira Matsunawa, Editor(s)

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