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Proceedings Paper

Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition
Author(s): Fumio Kokai; Kazuhiro Yamamoto; Yoshinori Koga
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Paper Abstract

Time-of-flight mass spectrometry has been used to probe neutral and positive ionic species produced by laser ablation of a graphite target at 266, 355, 532, and 1064 nm. The arrival time distributions of major carbon species (C3, C+, and C3+) at a deposition substrate, 45 mm from a target, were fitted with a thermal Maxwell-Boltzmann (MB) distribution or a shifted MB distribution with a narrower width. The characteristics of laser ablation with shorter-wavelength laser light are the formation of atomic carbon species with high kinetic energies and the promotion of their ionization. We discuss the generation process of C+ and the formation of a tetrahedral amorphous carbon film with a high fraction of sp3 bonded carbon atoms.

Paper Details

Date Published: 1 February 2000
PDF: 7 pages
Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); doi: 10.1117/12.376965
Show Author Affiliations
Fumio Kokai, Joint Research Consortium of Frontier Carbon Technology (Japan)
Kazuhiro Yamamoto, National Institute of Materials and Chemical Research (Japan)
Yoshinori Koga, Joint Research Consortium of Frontier Carbon Technology and National Institute of Material (Japan)


Published in SPIE Proceedings Vol. 3885:
High-Power Laser Ablation II
Claude R. Phipps; Masayuki Niino, Editor(s)

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