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Proceedings Paper

Experimental and numerical study of pulsed laser ablation in vacuum and ambient gas: application to pulsed laser deposition of thin films
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Paper Abstract

The application of the pulsed laser deposition technology requires a better understanding of the material evaporation mechanisms, of the gas and plasma plume formation, of its expansion and of its deposition onto the substrate. Experimental and numerical studies revealed the importance of the gas-phase collisions on the formation of a peaked angular distribution of particles described by cosp (theta) . Numerical calculations based on a Monte Carlo simulation of the desorption process were performed showing that the focusing effect of the angular distribution of particles increases with the number of collisions in the plume. This paper presents a 3D Monte Carlo simulation performed in vacuum and ambient gas in order to investigate the angular distribution of particles. Besides elastic collisions, the recombination-dissociation reactions proceed in the flow.

Paper Details

Date Published: 1 February 2000
PDF: 15 pages
Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); doi: 10.1117/12.376953
Show Author Affiliations
Michel L. Autric, Institute for Research on Non-Equilibrium Phenomena (France)
Tatiana Itina, Institute for Research on Non-Equilibrium Phenomena (France)


Published in SPIE Proceedings Vol. 3885:
High-Power Laser Ablation II
Claude R. Phipps; Masayuki Niino, Editor(s)

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