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Proceedings Paper

Auger depth profiling of thin SiC layers: practical aspects for a better understanding of quantitative analysis
Author(s): Ralf Pieterwas; Rastislav Kosiba; Gernot Ecke; Joerg Pezoldt; Hans Roessler
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Paper Abstract

The element sensitivity factors method and the factor analysis are the most important methods for quantification of Auger depth profiles. The present paper puts forward a criterion for the decision in which cases the use of factor analysis is necessary for the quantification. The presented criterion uses the fact, that changed chemical bonds via sample depth are connected with changed element sensitivity factors. A chosen SiC-Si sample was investigated by Target Factor Analysis. The influence of data pretreatment like data selection, normalization and filtering are discussed.

Paper Details

Date Published: 25 January 2000
PDF: 7 pages
Proc. SPIE 4064, Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (25 January 2000); doi: 10.1117/12.375442
Show Author Affiliations
Ralf Pieterwas, IGH Automation GmbH and Technische Univ. Ilmenau (Germany)
Rastislav Kosiba, Slovak Technical Univ. Bratislava and Technische Univ. Ilmenau (Slovak Republic)
Gernot Ecke, Technische Univ. Ilmenau (Germany)
Joerg Pezoldt, Technische Univ. Ilmenau (Germany)
Hans Roessler, Technische Univ. Ilmenau (Germany)


Published in SPIE Proceedings Vol. 4064:
Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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