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Proceedings Paper

Interference profilometry flutes with abrupt slopes in metal
Author(s): Mark L. Gourari; Anatolyi A. Liberman
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Paper Abstract

In this article the determination of a strict diffraction problem on 1D metal phase flutes is investigated, in application to a method of interference measurement with the help of laser profilometer.

Paper Details

Date Published: 13 December 1999
PDF: 5 pages
Proc. SPIE 4018, Optoelectronic Metrology, (13 December 1999); doi: 10.1117/12.373737
Show Author Affiliations
Mark L. Gourari, All-Russian Research Institute of Optical and Physical Measurements (Russia)
Anatolyi A. Liberman, All-Russian Research Institute of Optical and Physical Measurements (Russia)


Published in SPIE Proceedings Vol. 4018:
Optoelectronic Metrology
Jan Owsik; Tomasz Wiecek, Editor(s)

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