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Proceedings Paper

Laser-deposited active layers of chemical sensors
Author(s): Filip Vyslouzil; Martin Vrnata; Vladimir Myslik; Miroslav Jelinek
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Paper Abstract

Thin active layers of chemical sensor were deposited form tin dioxide targets by the pulsed laser deposition (PLD) method. The deposition was made by employing excimer KrF laser. The bearing part of the senor is an alumina chip provided by Pt-electrodes in the interdigital configuration. They serve for reading of the sensor response - DC resistance of active layer. Under reducing gases the resistance of the active layer decreases. For the stabilization of sensor properties it is necessary to use dopants. In this case the PLD technology enables an original solution-introduction of dopants as a multilayered structure. In order to improve the sensor parameters, catalytic Pt or Pd is vaporized to the surface of active layer in the form of non-aggregated particles.

Paper Details

Date Published: 29 December 1999
PDF: 6 pages
Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); doi: 10.1117/12.373646
Show Author Affiliations
Filip Vyslouzil, Institute of Chemical Technology (Czech Republic)
Martin Vrnata, Institute of Chemical Technology (Czech Republic)
Vladimir Myslik, Institute of Chemical Technology (Czech Republic)
Miroslav Jelinek, Institute of Physics (Czech Republic)

Published in SPIE Proceedings Vol. 4016:
Photonics, Devices, and Systems
Miroslav Hrabovsky; Pavel Tomanek; Miroslav Miler, Editor(s)

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