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Proceedings Paper

Measurement of submicron laser beam profiles using nanoprobes
Author(s): Petr Jakl; Alexandr Jonas; Josef Lazar; Ondrej Cip; Zdenek Harna; Miroslav Liska; Pavel Tomanek; Pavel Zemanek
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Paper Abstract

An experimental method for the measurement of the profile of the laser beam focused by a high NA lens is presented. A homemade PZT driven stage is used to scan a near-field optical microscope probe through the beam profile. The probe position is detected via strain gauges which were calibrated by laser interferometer and the intensity collected by the probe is measured by photomultiplier. The stage positioning accuracy +/- 50 nm enables the measurement of the intensity distributions within submicron-sized beam spots. As an example, intensity profiles of a TEM00 laser beam focused by a water immersion objective are presented.

Paper Details

Date Published: 29 December 1999
PDF: 6 pages
Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); doi: 10.1117/12.373644
Show Author Affiliations
Petr Jakl, Institute of Scientific Instruments and Brno Univ. of Technology (Czech Republic)
Alexandr Jonas, Institute of Scientific Instruments and Brno Univ. of Technology (Czech Republic)
Josef Lazar, Institute of Scientific Instruments (Czech Republic)
Ondrej Cip, Institute of Scientific Instruments (Czech Republic)
Zdenek Harna, Brno Univ. of Technology (Czech Republic)
Miroslav Liska, Brno Univ. of Technology (Czech Republic)
Pavel Tomanek, Brno Univ. of Technology (Czech Republic)
Pavel Zemanek, Institute of Scientific Instruments (Czech Republic)


Published in SPIE Proceedings Vol. 4016:
Photonics, Devices, and Systems

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