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Proceedings Paper

Proposed successor to barcode for automated reticle identification
Author(s): Thomas White; Winthrop A. Baylies; Karl Andrew Bernal; John Merva; William Bouvier
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Paper Abstract

Automated reticle identification faces new challenges as the industry approaches the arrival of 300 mm wafer fabs and the possible introduction of 230 mm reticles. Data Matrix is a useful and established encoding format, and is proposed as a successor to current barcode formats. The Data Matrix feasibility experiment is described and results discussed.

Paper Details

Date Published: 30 December 1999
PDF: 10 pages
Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); doi: 10.1117/12.373380
Show Author Affiliations
Thomas White, Advanced Micro Devices, Inc. (United States)
Winthrop A. Baylies, BayTech Group (United States)
Karl Andrew Bernal, RVSI (United States)
John Merva, Northeast Robotics Inc. (United States)
William Bouvier, Northeast Robotics Inc. (United States)

Published in SPIE Proceedings Vol. 3873:
19th Annual Symposium on Photomask Technology
Frank E. Abboud; Brian J. Grenon, Editor(s)

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