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Proceedings Paper

Beta test performance of the Leica LWM 250 UV CD measurement tool
Author(s): Robert K. Henderson
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Paper Abstract

This paper contains data and conclusions reached during a beta test of the Leica 250 UV CD measurement tool conducted in early 1999 at DuPont Photomasks' Reticle Technology Center. The tool was evaluated primarily for final CD measurement focusing specifically on tool accuracy and precision in the measurement of a variety of feature types in both I-line and broadband transmitted light. Tool resolution, screen linearity, induced systematic error, and measurement speed were also given some consideration. Comments on the general usability of the tool are also provided.

Paper Details

Date Published: 30 December 1999
PDF: 24 pages
Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); doi: 10.1117/12.373305
Show Author Affiliations
Robert K. Henderson, DuPont Photomasks, Inc. (United States)

Published in SPIE Proceedings Vol. 3873:
19th Annual Symposium on Photomask Technology
Frank E. Abboud; Brian J. Grenon, Editor(s)

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