Share Email Print
cover

Proceedings Paper

Solid state gas microsensors for environmental and industrial monitoring
Author(s): Robin M. Walton; Richard E. Cavicchi; Stephen Semancik; Balaji Panchapakesan; Don L. DeVoe; Maria I. Aquino-Class; James D. Allen; John S. Suehle
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We describe solid state gas microsensor array technology for real-time, low-cost environmental and industrial monitoring. The four-element, surface-micromachined arrays are designed in CMOS technology and consist of multiple platforms called 'microhotplates.' Each microhotplate can be individually addressed, and includes functionality for rapid control and measurement of sensor temperature and gas-induced changes in a sensing film's electrical properties. The array elements can be tuned for specific analytes, by choice of sensing material and the temperature-programs applied, in order to better meet the needs of a particular application. Tin oxide was used as the base sensing material for microhotplates used in these studies. Tin oxide is grown selectively on each individual element within the arrays using a chemical vapor deposition process involving thermal decomposition of tetramethyltin in an argon and oxygen ambient. Catalytic additives, such as Pt, Pd and Cu are surface-dispersed to make the films more selective and sensitive. Detection capabilities for the low power microhotplate sensing technology are being established for target analytes in ambients that are relevant to process control, environmental measurements, and vapor-related remediation studies. We describe the use of these micromachined arrays to detect approximately ppm levels of methanol, benzene and hydrogen in ambient air and to produce analyte-specific signatures using temperature programs, T(t).

Paper Details

Date Published: 21 December 1999
PDF: 8 pages
Proc. SPIE 3853, Environmental Monitoring and Remediation Technologies II, (21 December 1999); doi: 10.1117/12.372861
Show Author Affiliations
Robin M. Walton, National Institute of Standards and Technology (United States)
Richard E. Cavicchi, National Institute of Standards and Technology (United States)
Stephen Semancik, National Institute of Standards and Technology (United States)
Balaji Panchapakesan, Univ. of Maryland/College Park (United States)
Don L. DeVoe, Univ. of Maryland/College Park (United States)
Maria I. Aquino-Class, National Institute of Standards and Technology (United States)
James D. Allen, National Institute of Standards and Technology (United States)
John S. Suehle, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 3853:
Environmental Monitoring and Remediation Technologies II
Tuan Vo-Dinh; Robert L. Spellicy, Editor(s)

© SPIE. Terms of Use
Back to Top