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Proceedings Paper

Sub-wavelength optical nanolithography using imaging interferometry
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Date Published:
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Proc. SPIE SW03, Optical Sciences, ; doi: 10.1117/12.372406
Show Author Affiliations
Christian J. Schwarz, Ctr. for High Technology Materials/Univ. of New Mexico (United States)
Steven R. J. Brueck, Ctr. for High Technology Materials/Univ. of New Mexico (United States)


Published in SPIE Proceedings Vol. SW03:
Optical Sciences
Cynthia L. Vernold, Editor(s)

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