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Proceedings Paper

Aeroloader: an overhead transport system for semiconductor automation
Author(s): Gerald Friedman
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Paper Abstract

Automation of semiconductor manufacturing is a very large segment of the automation industry. The automation ranges from machinery capable of handling a single semiconductor wafer to automated material handling system that transport large numbers of these wafers at one time.

Paper Details

Date Published: 24 November 1999
PDF: 7 pages
Proc. SPIE 3832, Sensors and Controls for Intelligent Machining and Manufacturing Mechatronics, (24 November 1999); doi: 10.1117/12.371175
Show Author Affiliations
Gerald Friedman, PRI Automation, Inc. (United States)


Published in SPIE Proceedings Vol. 3832:
Sensors and Controls for Intelligent Machining and Manufacturing Mechatronics
Patrick F. Muir; George K. Knopf; Patrick F. Muir; Peter E. Orban, Editor(s)

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