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Proceedings Paper

Characterization of multilayer depositions of DVD-RAM disks
Author(s): Walter P. Hofmann; Gian Anton Zardini; Daniel Bernegger
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Paper Abstract

A method for rapid characterization of DVD multilayer depositions is presented. With a single optical measurement the devised method allows to determine the values of the refractive index (n) and of the extinction coefficient (k) for the wavelength comprised between 400 and 900 nm, and the film thickness. The analysis of these optical and physical properties provides a mean for tracking back possible process deviations in the multilayer sputtering of the DVD-RAM disks.

Paper Details

Date Published: 30 November 1999
PDF: 5 pages
Proc. SPIE 3806, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, (30 November 1999); doi: 10.1117/12.371153
Show Author Affiliations
Walter P. Hofmann, Memex Optical Media Solutions AG (Switzerland)
Gian Anton Zardini, Memex Optical Media Solutions AG (Switzerland)
Daniel Bernegger, Memex Optical Media Solutions AG (Switzerland)


Published in SPIE Proceedings Vol. 3806:
Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks
Fernando Luis Podio, Editor(s)

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