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Proceedings Paper

Smoothing of mirror substrates by thin-film deposition
Author(s): Eberhard Adolf Spiller; Sherry L. Baker; Enrique Parra; Charles Tarrio
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Paper Abstract

Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of figured optics from different vendors by atomic force microscopy and optical profilometry and have investigated how the substrate quality can be improved by the deposition of thin films. We have determined the growth parameters of several thin-film structures. From these parameters we can determine how the surface topography of a coated mirror differs from that of the substrate, select the best thin-film structure, and predict the possible improvement.

Paper Details

Date Published: 23 November 1999
PDF: 11 pages
Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); doi: 10.1117/12.371112
Show Author Affiliations
Eberhard Adolf Spiller, Lawrence Livermore National Lab. (United States)
Sherry L. Baker, Lawrence Livermore National Lab. (United States)
Enrique Parra, Univ. of Maryland/College Park (United States)
Charles Tarrio, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 3767:
EUV, X-Ray, and Neutron Optics and Sources
Carolyn A. MacDonald; Kenneth A. Goldberg; Juan R. Maldonado; Huaiyu Heather Chen-Mayer; Stephen P. Vernon, Editor(s)

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