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Proceedings Paper

Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer
Author(s): Tsuneyuki Haga; Marcia C. K. Tinene; Akira Ozawa; Yuichi Utsumi; Sei-ichi Itabashi; Takashi Ohkubo; Masaru Shimada
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Paper Abstract

Semitransparent Mo/Si multilayer films with a completely free- standing active area have been developed for use as optical elements in the soft x-ray region. They work not only as a beam splitter, but also as a transmissive polarizer and quarter-wave plate. To achieve a flat, smooth free-standing reflecting surface with a high reflectivity, the following fabrication problems were investigated: stress control of Mo/Si multilayer films, the surface roughness of the initial membrane, and the removal of the initial membrane. A flatness of 1 nm (rms) in the active area was obtained for a fabricated 10-mm-square semitransparent multilayer film. A multilayer film consisting of 50 free-standing pairs of semitransparent Mo/Si were fabricated for transmissive polarizer, and a soft x-ray ellipsometer was developed based on them. The fabricated multilayer polarizer was found to have good polarization performance. Placing two transmissive polarizers in the polarizer/compensator-sample-analyzer configuration enabled full control of the polarization of the probe beam. The modified polarization of light reflected from a sample was analyzed by the rotating-analyzer ellipsometry method. This system was used to measure a multilayer mirror. We verified that the soft X-ray ellipsometer is a very promising tool for the structural evaluation of multilayer films, providing a sensitivity in the sub-angstrom range.

Paper Details

Date Published: 25 November 1999
PDF: 15 pages
Proc. SPIE 3764, Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, (25 November 1999); doi: 10.1117/12.371092
Show Author Affiliations
Tsuneyuki Haga, NTT Telecommunications Energy Labs. (United States)
Marcia C. K. Tinene, NTT Telecommunications Energy Labs. (Japan)
Akira Ozawa, NTT Advanced Technology Corp. (Japan)
Yuichi Utsumi, NTT Basic Research Labs. (Japan)
Sei-ichi Itabashi, NTT Advanced Technology Corp. (Japan)
Takashi Ohkubo, NNTT Telecommunications Energy Labs. (Japan)
Masaru Shimada, NTT Telecommunications Energy Labs. (Japan)


Published in SPIE Proceedings Vol. 3764:
Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III
Silvano Fineschi; Bruce E. Woodgate; Randy A. Kimble, Editor(s)

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