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Proceedings Paper

Portable interference device for roughness measurement
Author(s): Oleg V. Angelsky; Ivan A. Buchkovsky; V. S. Lomanets; Peter P. Maksimyak
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Paper Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion. The proposed diagnostic method is applicable to arbitrarily shaped surfaces. The sensitivity limit of the method in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .

Paper Details

Date Published: 18 November 1999
PDF: 3 pages
Proc. SPIE 3904, Fourth International Conference on Correlation Optics, (18 November 1999); doi: 10.1117/12.370440
Show Author Affiliations
Oleg V. Angelsky, Chernivtsi Univ. (Ukraine)
Ivan A. Buchkovsky, Chernivtsi Univ. (Ukraine)
V. S. Lomanets, Chernivtsi Univ. (Ukraine)
Peter P. Maksimyak, Chernivtsi Univ. (Ukraine)


Published in SPIE Proceedings Vol. 3904:
Fourth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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