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Proceedings Paper

Formation features of microdefect x-ray topography images in silicon crystals
Author(s): Igor M. Fodchuk; M. D. Raransky; S. M. Novikov; P. E. Marmus; S. V. Bobrovnik
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Paper Abstract

On the basis of the numerical solution of Takagi's equation system the influence of ultrasonic wave parameters on enhancement and suppression of diffraction contrast of microdefects on section topographs is investigated. Homogeneous (n equals 6,2 (DOT) 105 cm-3) and random (n equals 2,5 (DOT) 107 cm-3) distribution of microdefects in volume are considered for thin ((mu) t equals 1) and intermediate ((mu) t approximately equals 3) thickness of Si crystal. Influence of strain fields from microdefects and homogeneous strains from ultra sound on integral parameters of crystal perfection is studied.

Paper Details

Date Published: 18 November 1999
PDF: 7 pages
Proc. SPIE 3904, Fourth International Conference on Correlation Optics, (18 November 1999); doi: 10.1117/12.370439
Show Author Affiliations
Igor M. Fodchuk, Chernivtsi State Univ. (Ukraine)
M. D. Raransky, Chernivtsi State Univ. (Ukraine)
S. M. Novikov, Chernivtsi State Univ. (Ukraine)
P. E. Marmus, Chernivtsi State Univ. (Ukraine)
S. V. Bobrovnik, Chernivtsi State Univ. (Ukraine)


Published in SPIE Proceedings Vol. 3904:
Fourth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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