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Proceedings Paper

TiO2/SiO2/ORMOSIL hybrid material planar waveguides prepared at low-temperature by sol-gel processing
Author(s): Wenxiu Que; Yan Zhou; Yee Loy Lam; Yuen Chuen Chan; Shi De Cheng; He Ping Li; Jian Liu; Chan Hin Kam
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Paper Abstract

We report the preparation of sol-gel derived planar waveguides from high titanium content hybrid materials. By incorporating organic molecules into the inorganic TiO2- SiO2 sol-gel glass matrix, porous-free waveguide films are obtained with low temperature heat treatment. The single spin-on thickness is measured to be more than 1.7 micrometers , enough to support light guiding and the refractive index of the film is found to depend on the heat treatment temperature. We also studied the microstructural and optical properties of the waveguide films using atomic force microscopy, ellipsometry, thermal gravimetric analysis, and UV-visible spectroscopy. Based on these experimental results, we found that heat-treatment at a temperature about 100 degrees C is sufficient to produce a relatively dense film with high transmission in the visible and near IR range. We believe that this process is very useful for the fabrication of passive photonic circuits on temperature sensitive substrates such as III-V compound semiconductors. Meanwhile, it has also been noted that a purely inorganic and crack-free silica-titan films could be obtained after baking the hybrid material film at 500 degrees C or higher.

Paper Details

Date Published: 12 November 1999
PDF: 7 pages
Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); doi: 10.1117/12.370345
Show Author Affiliations
Wenxiu Que, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Shi De Cheng, Nanyang Technological Univ. (Singapore)
He Ping Li, Nanyang Technological Univ. (Singapore)
Jian Liu, Nanyang Technological Univ. (Singapore)
Chan Hin Kam, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 3896:
Design, Fabrication, and Characterization of Photonic Devices

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