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Proceedings Paper

Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics
Author(s): Jian Liu; Yee Loy Lam; Yuen Chuen Chan; Yan Zhou; Wenxiu Que; Gu Tan; Boon Siew Ooi
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Paper Abstract

In this paper, we present the fabrication of sol-gel derived silica based films on InP using both inorganic and composite material precursors. Thin silica films with thicknesses less than 0.5 μm, are achieved using an inorganic precursor by means of multiple spin coatings and rapid thermal processing at an annealing temperature of 450°C. The cracking pattern of the inorganic silica film on InP is analyzed. Thick films are derived from composite materials by multiple spin coatings with only furnace baking at 150°C. In addition, the different properties of each type of films and their potential applications in terms of monolithic integration are discussed.

Paper Details

Date Published: 12 November 1999
PDF: 8 pages
Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); doi: 10.1117/12.370341
Show Author Affiliations
Jian Liu, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Wenxiu Que, Nanyang Technological Univ. (Singapore)
Gu Tan, Nanyang Technological Univ. (Singapore)
Boon Siew Ooi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 3896:
Design, Fabrication, and Characterization of Photonic Devices
Marek Osinski; Soo-Jin Chua; Shigefusa F. Chichibu, Editor(s)

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