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Proceedings Paper

Microhotplate gas sensor arrays
Author(s): Richard E. Cavicchi; Stephen Semancik; Robin M. Walton; Balaji Panchapakesan; Don L. DeVoe; Maria I. Aquino-Class; James D. Allen; John S. Suehle
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Paper Abstract

In this work, micromachining and planar processing have been used to produce gas sensing devices with lower power consumption at lower cost. The small size brings new advantages for chemical selectivity as well: multi-element arrays whose time-varying signals can be interpreted using pattern recognition methods. The device platform is a `microhotplate,' consisting of a built-in heater, thermometer, and electrodes to probe the sensing films. Microhotplates are fabricated using CMOS-compatible technologies, enabling on-chip circuitry for multiplexing and signal amplification.

Paper Details

Date Published: 18 November 1999
PDF: 12 pages
Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); doi: 10.1117/12.370293
Show Author Affiliations
Richard E. Cavicchi, National Institute of Standards and Technology (United States)
Stephen Semancik, National Institute of Standards and Technology (United States)
Robin M. Walton, National Institute of Standards and Technology (United States)
Balaji Panchapakesan, Univ. of Maryland (United States)
Don L. DeVoe, Univ. of Maryland (United States)
Maria I. Aquino-Class, National Institute of Standards and Technology (United States)
James D. Allen, National Institute of Standards and Technology (United States)
John S. Suehle, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 3857:
Chemical Microsensors and Applications II
Stephanus Buettgenbach, Editor(s)

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