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Proceedings Paper

Detection of volatile organics using a surface acoustic-wave array system
Author(s): Richard W. Cernosek; W G. Yelton; C. W. Colburn; Larry F. Anderson; A. W. Staton; Gordon C. Osbourn; John W. Bartholomew; R. F. Martinez; Antonio J. Ricco; Richard M. Crooks
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Paper Abstract

A chemical sensor system based on arrays of surface acoustic wave (SAW) delay lines has been developed for identification and quantification of volatile organic compounds. The individual SAW chemical sensors consist of interdigital transducers patterned on the surface of an ST-cut quartz substrate to launch and detect the acoustic waves and a thin film coating in the SAW propagation path to perturb the acoustic wave velocity and attenuation during analyte sorption.

Paper Details

Date Published: 18 November 1999
PDF: 12 pages
Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); doi: 10.1117/12.370282
Show Author Affiliations
Richard W. Cernosek, Sandia National Labs. (United States)
W G. Yelton, Sandia National Labs. (United States)
C. W. Colburn, Sandia National Labs. (United States)
Larry F. Anderson, Sandia National Labs. (United States)
A. W. Staton, Sandia National Labs. (United States)
Gordon C. Osbourn, Sandia National Labs. (United States)
John W. Bartholomew, Sandia National Labs. (United States)
R. F. Martinez, Sandia National Labs. (United States)
Antonio J. Ricco, ACLARA Biosciences, Inc. (United States)
Richard M. Crooks, Texas A&M Univ. (United States)


Published in SPIE Proceedings Vol. 3857:
Chemical Microsensors and Applications II
Stephanus Buettgenbach, Editor(s)

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