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Proceedings Paper

Pulsed-laser deposition as a novel preparation technique for chemical microsensors
Author(s): Michael J. Schoening; Juergen Schubert; Willi Zander; Mattea Mueller-Veggian; Andrey V. Legin; Yuri G. Vlasov; Peter Kordos; Hans Lueth
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Paper Abstract

The application of sensitive layers for chemical microsensors consisting of multicomponent compositions and dielectric materials requires specific deposition techniques, since the different chemical and physical properties of the respective components can be significantly disturbed during the deposition process. To avoid this drawback, the pulsed laser deposition technique is suggested as a novel thin film preparation method for such sensor devices.

Paper Details

Date Published: 18 November 1999
PDF: 11 pages
Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); doi: 10.1117/12.370281
Show Author Affiliations
Michael J. Schoening, Research Ctr. Juelich and Univ. of Applied Sciences (Germany)
Juergen Schubert, Research Ctr. Juelich (Germany)
Willi Zander, Research Ctr. Juelich (Germany)
Mattea Mueller-Veggian, Univ. of Applied Sciences (Germany)
Andrey V. Legin, St. Petersburg Univ. (Russia)
Yuri G. Vlasov, St. Petersburg Univ. (United States)
Peter Kordos, Research Ctr. Juelich (Germany)
Hans Lueth, Research Ctr. Juelich (Germany)

Published in SPIE Proceedings Vol. 3857:
Chemical Microsensors and Applications II
Stephanus Buettgenbach, Editor(s)

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