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Proceedings Paper

Development and characterization of an NMR microsensor for nanoliter sample volumes
Author(s): Joern Dechow; Alfred W. B. Forchel; Titus Lanz; Axel Haase
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Paper Abstract

The fabrication and performance of a micro-sensor for NMR- spectroscopy of nanoliter-sample volumes is presented. On both glass and GaAs-substrate. Planar coils with inner diameter from 50 micrometers to 400 micrometers including a coplanar wave-guide leading to the bonding pads were fabricated. A chamber for the liquid samples of 200 - 500 micrometers diameter was etched isotropically on the backside of the substrate, located under the coil. In initial experiments, the spectrum of a 20 - 50 nl-volumes of pure silicon-oil is analyzed in a 1H-NMR experiment in a 11T spectrometer (500 MHz). The microcoil serves as a receiver, while the RF-power was transmitted by a macroscopic coil perpendicular to the receiver coil. We observe characteristic lines from the silicon-oil spectrum which clearly indicates the high sensitivity of the microcoil. Additional signal from different materials in the experiment are suppressed by gradient fields and an adequate design of the sensor.

Paper Details

Date Published: 18 November 1999
PDF: 6 pages
Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); doi: 10.1117/12.370276
Show Author Affiliations
Joern Dechow, Univ. Wuerzburg (Germany)
Alfred W. B. Forchel, Univ. Wuerzburg (Germany)
Titus Lanz, Univ. Wuerzburg (Germany)
Axel Haase, Univ. Wuerzburg (Germany)


Published in SPIE Proceedings Vol. 3857:
Chemical Microsensors and Applications II
Stephanus Buettgenbach, Editor(s)

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