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Proceedings Paper

Fabrication of diffractive optics and digital optics for gigahertz to optical spectrum
Author(s): Yu Huang; Xiaohu Zhang; Xudong Wang; R. Jennifer Hwu
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Paper Abstract

The fabrication of diffractive optics and digital optics on fused silica has been investigated in this paper. The diffractive optics has been fabricated by using the gray- scale mask technique. The gray scale mask is fabricated on the HERB glass. RIE is used to realize the pattern transfer from the photoresist to the fused silica for the diffractive optics and the etching for the digital optics. The processing parameters are discussed in detail and the influence of exposure and development of the photoresist are also addressed in this paper. These diffractive optics and digital optics were designed to collimate optical radiation.

Paper Details

Date Published: 12 November 1999
PDF: 8 pages
Proc. SPIE 3795, Terahertz and Gigahertz Photonics, (12 November 1999); doi: 10.1117/12.370213
Show Author Affiliations
Yu Huang, Univ. of Utah (United States)
Xiaohu Zhang, Univ. of Utah (United States)
Xudong Wang, Univ. of Utah (United States)
R. Jennifer Hwu, Univ. of Utah (United States)

Published in SPIE Proceedings Vol. 3795:
Terahertz and Gigahertz Photonics
R. Jennifer Hwu; Ke Wu, Editor(s)

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