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Proceedings Paper

Antenna-coupled niobium bolometers for millimeter-wave imaging arrays
Author(s): Shalva Nolen; Jonathan A. Koch; Nicholas G. Paulter; Carl D. Reintsema; Erich N. Grossman
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Paper Abstract

Antenna-coupled thin-film niobium microbolometers designed for mm-wave imaging arrays have been fabricated and their electrical properties measured. The niobium bolometers are operated at room temperature and are located at the feeds of half-wave dipole antennas on an electrically thick silicon substrate. We independently measured the resistance of the microbolometers as a function of temperature and the dynamic resistance as a function of DC bias current, yielding the electrical responsivity and thermal conductance of the bolometers. The latter is dominated by conduction through a deposited SiO2 isolation layer. We describe electrical measurements of the bolometers' pulse response and noise, performed by illuminating the bolometers with a high power, pulsed mm-wave source. We discuss these measurements in the context of the pulsed detection architecture planned for an active mm-wave imaging system currently under development.

Paper Details

Date Published: 12 November 1999
PDF: 8 pages
Proc. SPIE 3795, Terahertz and Gigahertz Photonics, (12 November 1999); doi: 10.1117/12.370173
Show Author Affiliations
Shalva Nolen, National Institute of Standards and Technology (United States)
Jonathan A. Koch, National Institute of Standards and Technology (United States)
Nicholas G. Paulter, National Institute of Standards and Technology (United States)
Carl D. Reintsema, National Institute of Standards and Technology (United States)
Erich N. Grossman, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 3795:
Terahertz and Gigahertz Photonics
R. Jennifer Hwu; Ke Wu, Editor(s)

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