Proceedings PaperApproximation method of resolution based on information-passing capacity (IPC) of an electron optical system
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Spatial resolution of an optical system can be evaluated accurately taking into account of signal-to-noise ratio in terms of the information-passing capacity (IPC) of an optical system. In order to determine resolution of an optical system including effects of aberrations and source size, the IPC is approximated in terms of various analytical functions determined by numerically computed results of the IPC. This approximation method (the IPC method) allows to estimate resolution of an optical system under geometrical condition (wavelength equals 0) and diffraction limited condition (wavelength does not equal 0). The calculated resolution well represents the behavior of the actual SEM images obtained at various beam convergence half-angles using a field emission type in-lens SEM.