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Proceedings Paper

Fast parallel acquisition electron energy analyzer
Author(s): Christopher G. H. Walker; Andrew Walker; Ranjan Badheka; Sumio Kumashiro; Marcus Jacka; Mohamed El Gomati; Martin Prutton; Frank H. Read
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Paper Abstract

A new type of electrostatic electron energy analyzer is described that can acquire an electron energy spectrum in 'one shot.' It uses a hyperbolic field to focus electrons emitted from a solid in the energy range 50 eV to 2500 eV into a dispersive plane of about 50 mm length. An expression for the energy resolution is given and the effect of side and base plates on the behavior of the device is discussed. The main intended area of application for this type of analyzer is parallel data acquisition in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). The potential to acquire a spectrum is just a few seconds is possible with this device.

Paper Details

Date Published: 15 November 1999
PDF: 12 pages
Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); doi: 10.1117/12.370135
Show Author Affiliations
Christopher G. H. Walker, Shimadzu Research Lab. Ltd. (United Kingdom)
Andrew Walker, Shimadzu Research Lab. Ltd. (United Kingdom)
Ranjan Badheka, Shimadzu Research Lab. Ltd. (United Kingdom)
Sumio Kumashiro, Shimadzu Research Lab. Ltd. (United Kingdom)
Marcus Jacka, Univ. of York (United Kingdom)
Mohamed El Gomati, Univ. of York (United Kingdom)
Martin Prutton, Univ. of York (United Kingdom)
Frank H. Read, Univ. of Manchester (United Kingdom)

Published in SPIE Proceedings Vol. 3777:
Charged Particle Optics IV
Eric Munro, Editor(s)

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