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Proceedings Paper

Integration of an adaptive parallel N-body solver into a particle-by-particle electron-beam interaction simulator
Author(s): David T. Blackston; James W. Demmel; Andrew R. Neureuther; Bo Wu
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Paper Abstract

An adaptively refinable Fast Multipole library called Pbody has been developed and used to rigorously analyze statistical electron-electron interactions at high density field free regions in crossovers in electron beam lithography systems. The parallel algorithm and associated interaction decision regimes, communication and processor load balancing are portable to multiple processor networks supporting C and MPI. Beam blur effects at beam currents up to 30 (mu) A can be analyzed in a few hours. A basic imaging system with a crossover and no initial angular or energy spread was analyzed. At a given time step, electrons which experience a transverse force sufficient to influence the beam blur were first recorded. This set of electrons was then analyzed for the number of close neighbors and their relative contributions to the transverse statistical force. The data indicates that interactions with multiple rather than nearest neighbors almost immediately becomes the norm rather than the exception once the current reaches a level at which the average spacing between the electrons is about 48 micrometer.

Paper Details

Date Published: 15 November 1999
PDF: 12 pages
Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); doi: 10.1117/12.370132
Show Author Affiliations
David T. Blackston, Univ. of California/Berkeley (United States)
James W. Demmel, Univ. of California/Berkeley (United States)
Andrew R. Neureuther, Univ. of California/Berkeley (United States)
Bo Wu, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 3777:
Charged Particle Optics IV
Eric Munro, Editor(s)

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