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Proceedings Paper

Construction and design of a high-resolution portable scanning electron microscope column
Author(s): Anjam Khursheed
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Paper Abstract

This paper presents Hall probe measurements on the recently proposed high resolution portable Scanning Electron Microscope (SEM) concept. A test column using permanent magnet lenses was constructed and has a height of 120 mm. Experimental axial flux density measurements were found to correlate well with simulation predictions. A method of varying the axial field strength by using magnetic shorting plates was investigated and found to be successful. In this way, the beam energy can be varied, and the portable permanent magnet column will be able to operate in a similar way to conventional SEMs.

Paper Details

Date Published: 15 November 1999
PDF: 9 pages
Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); doi: 10.1117/12.370121
Show Author Affiliations
Anjam Khursheed, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3777:
Charged Particle Optics IV
Eric Munro, Editor(s)

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