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Proceedings Paper

Simulation of multipole systems including primary and secondary aberration analysis
Author(s): Haoning Liu
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Paper Abstract

A software package has been developed for simulating and designing multipole systems containing electrostatic round lenses, electrostatic and magnetic quadrupole, hexapole and octopole lenses, and Wien filters. Using our SOFEM and 3D packages, the field functions and their derivatives of these optical elements can be computed very accurately. This new software, using those field functions as input, computes and plots paraxial rays, primary and secondary aberrations for the analyzed systems. Computing paraxial rays, primary geometrical aberrations, primary and secondary chromatic aberrations is based on the formulae presented by Smith; while a set of newly derived formulae is employed to evaluate the secondary geometrical aberrations. Three examples are presented to illustrate the functionality of this software package.

Paper Details

Date Published: 15 November 1999
PDF: 15 pages
Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); doi: 10.1117/12.370119
Show Author Affiliations
Haoning Liu, Munro's Electron Beam Software Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 3777:
Charged Particle Optics IV
Eric Munro, Editor(s)

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