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Proceedings Paper

3D simulation of flat-cathode electron guns with space charge
Author(s): John A. Rouse; Xieqing Zhu; Eric Munro; Haoning Liu; Warren K. Waskiewicz; Victor Katsap
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Paper Abstract

Simulation software has been written to calculate the properties of electron guns which have flat cathodes and a fully three-dimensional electrode structure. Volumetric space charge effects are significant in such guns and a three- dimensional solution of Poisson's equation is required. This, in turn, requires a simulation of the cathode and its emission properties, a three-dimensional electrostatic potential calculation and a direct ray trace of charged particles through the gun. The motivation for this work was to have software tools to enable the analysis and design of flat cathode guns, for example, guns for cathode ray tubes (CRTs) and a suitable source for the SCALPEL projection lithography column. CRT guns usually have three cathodes and non-circular apertures in the electrodes. A proposed design for the SCALPEL gun has a large-area flat cathode with a fine grid parallel to the cathode and just in front of it. The techniques used in the software are presented and described and the capabilities of the software are illustrated by the analysis of some flat cathode guns.

Paper Details

Date Published: 15 November 1999
PDF: 10 pages
Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); doi: 10.1117/12.370116
Show Author Affiliations
John A. Rouse, Munro's Electron Beam Software Ltd. (United Kingdom)
Xieqing Zhu, Munro's Electron Beam Software Ltd. (United Kingdom)
Eric Munro, Munro's Electron Beam Software Ltd. (United Kingdom)
Haoning Liu, Munro's Electron Beam Software Ltd. (United Kingdom)
Warren K. Waskiewicz, Lucent Technologies/Bell Labs. (United States)
Victor Katsap, Lucent Technologies/Bell Labs. (United States)

Published in SPIE Proceedings Vol. 3777:
Charged Particle Optics IV
Eric Munro, Editor(s)

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