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Proceedings Paper

Metrology of the mirrors at the Taiwan Light Source
Author(s): Duan-Jen Wang; T. C. Tseng; Shean-Jen Chen; Shen-Yaw Perng; Chien-Kuang Kuan; S. H. Ho
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Paper Abstract

A Long trace profiler II (LTP II) with a stationary optical head and a moving penta prism was set up in our new metrology laboratory. It is a clean room with plus or minus 0.1 degrees Celsius temperature control for the stable measurement of LTP II. Some tests on the stability and repeatability of the LTP II were performed. The long term drift is less than 1 (mu) rad in 15 hours. The repeatability in the forward and backward scan is about 0.2 (mu) rad. Mirrors with different kinds of bending mechanisms were evaluated by the LTP II, some comments on the mounting and bending of the mirrors are discussed.

Paper Details

Date Published: 16 November 1999
PDF: 8 pages
Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, (16 November 1999); doi: 10.1117/12.370086
Show Author Affiliations
Duan-Jen Wang, Synchrotron Radiation Research Ctr. (Taiwan)
T. C. Tseng, Synchrotron Radiation Research Ctr. (Taiwan)
Shean-Jen Chen, Synchrotron Radiation Research Ctr. (Taiwan)
Shen-Yaw Perng, Synchrotron Radiation Research Ctr. (Taiwan)
Chien-Kuang Kuan, Synchrotron Radiation Research Ctr. (Taiwan)
S. H. Ho, Synchrotron Radiation Research Ctr. (Taiwan)


Published in SPIE Proceedings Vol. 3773:
X-Ray Optics Design, Performance, and Applications
Ali M. Khounsary; Andreas K. Freund; Tetsuya Ishikawa; George Srajer; Jonathan C. Lang, Editor(s)

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