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Proceedings Paper

Analysis of a MEMS vibration detector
Author(s): Anuj Gupta; Smriti Mukherjee; Vinoy K. Jain; Amita Gupta
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Paper Abstract

A MEMS vibration detector fabricated at the Solid State PHysics Laboratory, Delhi, has been analyzed for its mechanical response. The sensor consists of a central plate mounted on webs. Change of capacitance between the central plate and the base is used to measure the vibration. This paper describes analysis of the mechanical characteristics of the device.

Paper Details

Date Published: 9 November 1999
PDF: 3 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369478
Show Author Affiliations
Anuj Gupta, Indian Institute of Technology/Delhi (India)
Smriti Mukherjee, Indian Institute of Technology/Delhi (India)
Vinoy K. Jain, Solid State Physics Lab. (India)
Amita Gupta, Solid State Physics Lab. (India)


Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)

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