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Proceedings Paper

MEMS (micro-electro-mechanical Systems) technology: an overview and SCL's role
Author(s): Ashwani Tuknayat; H. S. Jatana; Dina Nath Singh
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Paper Abstract

Today's advanced IC fabrication techniques have let silicon micromachined into the tiniest electromechanical systems ever built. In just ten years, MEMS has blossomed into a vital industry with numerous practical applications. Semiconductor Complex Ltd., the nation's leading VLSI company has developed CMOS technologies which are in tune with the MEMS fabrication process.

Paper Details

Date Published: 9 November 1999
PDF: 12 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369468
Show Author Affiliations
Ashwani Tuknayat, Semiconductor Complex, Ltd. (India)
H. S. Jatana, Semiconductor Complex, Ltd. (India)
Dina Nath Singh, Semiconductor Complex, Ltd. (India)

Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)

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