Proceedings Paper
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Paper Abstract
There have been several cantilever-based actuators which provide movement in a direction transverse to the length of the cantilever. Here we describe a novel actuator which gives movement in the same direction as that of the length of the element. This is achieved by a curling up action of a bimetal like 'metal on silicon dioxide' straight element due to large differences in the coefficients of linear expansions and the high temperature which is obtained during the metal deposition.
Paper Details
Date Published: 9 November 1999
PDF: 8 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369464
Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)
PDF: 8 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369464
Show Author Affiliations
Prakash R. Apte, Tata Institute of Fundamental Research (India)
S. G. Lokhre, Tata Institute of Fundamental Research (India)
S. C. Purandare, Tata Institute of Fundamental Research (India)
S. G. Lokhre, Tata Institute of Fundamental Research (India)
S. C. Purandare, Tata Institute of Fundamental Research (India)
B. Gajanan, Datta Meghe College of Engineering (India)
Kumar Virwani, Datta Meghe College of Engineering (United States)
Kumar Virwani, Datta Meghe College of Engineering (United States)
Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)
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