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Proceedings Paper

Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing
Author(s): Arvind D. Shaligram; Prakash R. Apte; Damayanti C. Gharpure; L. Sudha
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Paper Abstract

This paper presents design of an hybrid micromachined silicon - fiber optic pressure sensor array for tactile sensing applications. Tactile sensing is basically related to identify the surface texture through pressure/strain distribution over a sensor matrix. Silicon micromachining technology has shown the capabilities of producing structures like diaphragms, cantilevers and precise holes. With anisotropic etching and techniques like boron stop these structures can be designed to desired precision. Conventionally, techniques like deposited or doped piezoresistors on the diaphragms or cantilevers are used for pressure/strain sensing. These, however, require support of sophisticated external signal conditioning.

Paper Details

Date Published: 9 November 1999
PDF: 7 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369463
Show Author Affiliations
Arvind D. Shaligram, Univ. of Pune (India)
Prakash R. Apte, Tata Institute of Fundamental Research (India)
Damayanti C. Gharpure, Univ. of Pune (India)
L. Sudha, Univ. of Pune (India)


Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)

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