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Proceedings Paper

Three-dimensional micron and submicron structures based on fiberglass technologies
Author(s): Valentin I. Beloglazov; Sergey P. Soukhoveev; Nikolay V. Suetin
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Paper Abstract

New microcomponent constructions and fabrication method have been proposed and developed. This new approach is based on fiberglass technology. The outstanding opportunities of this technology have been demonstrated and used for fabrication of submicrometer x-ray mask; synchronous micrometer containing permanent magnet; microcoil with 7 micrometer lines. Our technology gives an opportunity for fabrication of the structures with extremely high aspect ratio, spiral- like conductor and so on. Developed technology does not use expensive x-ray lithography. Possible application of developed technology for production different microcomponents for electron and x-ray optics components, MEMS and other devices have been discussed.

Paper Details

Date Published: 9 November 1999
PDF: 7 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369452
Show Author Affiliations
Valentin I. Beloglazov, Institute of Electromachinery and Glass (Russia)
Sergey P. Soukhoveev, MNTK Robot (Russia)
Nikolay V. Suetin, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)

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