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Proceedings Paper

Plane wave quantity and its measurement of plate working surface
Author(s): Jun-Qi Liu; Yanan Liu; Linxiang Cao; XiaoMing Zhao
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Paper Abstract

This paper deals with the assay requirements and the method of plane. Wave quantity of the plate working surface according to the National Standards of 'cast iron plate' and 'rock plate', derives in detail, the detecting principle of plane wave detector and gives out the relationship between the partial plane error and the partial defect of the plate and the plane wave quantity. It also inquires into the relationship between the contact spot and 200 mm straight line wave and plane wave quantity.

Paper Details

Date Published: 9 November 1999
PDF: 6 pages
Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); doi: 10.1117/12.369440
Show Author Affiliations
Jun-Qi Liu, Xi'an Institute of Optics and Precision Mechanics (China)
Yanan Liu, Xi'an Institute of Optics and Precision Mechanics (China)
Linxiang Cao, Northwestern Polytechnical Univ. (China)
XiaoMing Zhao, Xi'an Institute of Optics and Precision Mechanics (China)


Published in SPIE Proceedings Vol. 3899:
Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures
Seng Tiong Ho; Yan Zhou; Weng W. Chow; Yasuhiko Arakawa, Editor(s)

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