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Proceedings Paper

InGaAlP quantum well microcavities of circular or deformed disks and disks with microstructures
Author(s): Bei-Wei Zhang; Guozhong Wang; YunQing Chen; Dai Lun; Wei Fang; Dajun Wang; Yumin Shen; Yi Qian; Shifa Xu; ZhiAn Lai; Xing Zhu; Ruo Peng Wang; Xiaoyu Ma
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Paper Abstract

OPtical microdisk is based on circularly symmetric micro- resonator and featured of the 'whispering-galley' modes with high quality of factor Q. However, the non-preferred directional emission and lack of high output from the disk are its drawbacks for application. Recently, a remarkable advance in the novel deformed microdisk laser at middle-IR wavelength is highly attractive. In this report, as a preliminary try for microdisk at visible range, the InGaAlP quantum well circular cylindrical and deformed microdisks with radii about 2.5 to 10 micrometers emitting at wavelength of 0.62-0.67 micrometers were prepared by electron beam lithography and wet etching processing etc. The optical emission properties of these microdisks and studied by employing the scanning electron microscopy, atomic force microscopy, fluorescence image microspace and scanning near-field optical microscopy etc. The preferential emission in these deformed microdisks was visually observed. When the cross section of microdisk was gradually deformed from circle, the change of fluorescence image from uniform ring towards 2 or 4 favorable emission along the circumference of microdisks was confirmed. The deformation could be caused by either the shape or etching profile of the disk waveguide. In addition, the microdisks patterned with some microstructures were proposed.

Paper Details

Date Published: 9 November 1999
PDF: 7 pages
Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); doi: 10.1117/12.369402
Show Author Affiliations
Bei-Wei Zhang, Peking Univ. (China)
Guozhong Wang, Peking Univ. (China)
YunQing Chen, Peking Univ. (China)
Dai Lun, Peking Univ. (China)
Wei Fang, Peking Univ. (China)
Dajun Wang, Peking Univ. (China)
Yumin Shen, Peking Univ. (Japan)
Yi Qian, Peking Univ. (China)
Shifa Xu, Peking Univ. (China)
ZhiAn Lai, Peking Univ. (China)
Xing Zhu, Peking Univ. (China)
Ruo Peng Wang, Peking Univ. (China)
Xiaoyu Ma, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 3899:
Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures
Seng Tiong Ho; Yan Zhou; Weng W. Chow; Yasuhiko Arakawa, Editor(s)

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