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Proceedings Paper

Improved silicon micromachined 3D mirror for acceleration sensing using an extrashort external-cavity laser self-mixing interferometer
Author(s): Franck Alexis Chollet; Ai Qun Liu; Ludi Zheng; Anand Krishna Asundi; LiWie Lin
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Paper Abstract

We have designed a ne type of folding suspended polysilicon micro-mirror, integrating a new type of precision position- lock, a new compact design for the hinges and a bi- directional electrostatic actuator to bias the position of the mirror. The mirror is intended to be used in a very short external cavity laser configuration for acceleration/displacement sensing. An extensive theory has been built to guide the design and the fabrication of the sensor.

Paper Details

Date Published: 9 November 1999
PDF: 11 pages
Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); doi: 10.1117/12.369381
Show Author Affiliations
Franck Alexis Chollet, Institute of Materials Research and Engineering (Singapore)
Ai Qun Liu, Institute of Materials Research and Engineering (Singapore)
Ludi Zheng, Nanyang Technological Univ. (China)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
LiWie Lin, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 3899:
Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures

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