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Proceedings Paper

Simulation and study on the temperature effect of the a-Ta2O5 ISFET
Author(s): Jung Chuan Chou; Ying Shin Li
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Paper Abstract

In the research, we simulated the temperature characteristics of the a-Ta2O5 ISFET by the Gouy- Chapman-Stern theory. The values of the pKa and pKb would be induced to calculate the temperature coefficients of the a-Ta2O5 ISFETs for predicting the behaviors of the a-Ta2O5 ISFET under different temperatures. In the experiment we used the method finding the VGS values of the experimental curves by fixed IDS value to get the pH sensitivities at different temperatures. By using the same way we could change the temperatures to find the temperature coefficients in different pH solutions. The relationship of the pH sensitivities of a-Ta2O5 ISFET versus the temperatures were the linear. Oppositely the curves of the temperature coefficients is not linearly obviously.

Paper Details

Date Published: 11 November 1999
PDF: 8 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369378
Show Author Affiliations
Jung Chuan Chou, National Yunlin Univ. of Science and Technology (Taiwan)
Ying Shin Li, National Yunlin Univ. of Science and Technology (Taiwan)

Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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