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Proceedings Paper

Spectrally resolved white-light interferometry for profilometry with polarization phase shifter
Author(s): S. Suja Helen; Mahendra P. Kothiyal; Rajpal S. Sirohi
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Paper Abstract

We describe a spectrally resolved white light interferometer with polarization phase shifter for use in surface profiling. Phase shifting is introduced by a rotating half- wave plate. The phase shifted intensity values needed for the phase calculation at each pixel are obtained from the same pixel instead of different pixels, thereby avoiding error due to variation in sensitivities of different pixels.

Paper Details

Date Published: 11 November 1999
PDF: 6 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369373
Show Author Affiliations
S. Suja Helen, Indian Institute of Technology/Madras (India)
Mahendra P. Kothiyal, Indian Institute of Technology/Madras (India)
Rajpal S. Sirohi, Indian Institute of Technology/Madras (India)

Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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