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Proceedings Paper

Dynamic and spectral responses of a micromachined Fabry-Perot interferometer-based spectrometer
Author(s): Kuo Kang Liu; Shih Ping Lee; Ran-Jin Lin; Long Hsu
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Paper Abstract

The dynamic and spectral responses of a micromachined Fabry- Perot interferometer (FPI) subjected to an electrostatic force have been simulated. The FPI features a circular corrugated diaphragm supporting a flat thin film coated optical mirror that can be driven by four electrodes. These four electrodes serve not only to fine adjust the parallelism but also to tune the air gap between the mirrors and hence the characteristic wavelengths of the interferometer. Regarding to the dynamics response of the flat diaphragm, we consider a force balance among the squeezing-film damping, the spring force of the corrugated diaphragm, the inertia force of the flat diaphragm, and the electrostatic attraction force. The spectral response of a novel FPI based spectrometer that consists of two FPIs in tandem has been modeled and simulated. Contrary to the second-order oscillation normally existed in a mass-spring- damper system, for the current system, and dynamic of the optical mirror released from a pre-deflection displays an over-damping effect, which depicts the simulated mirror deflection as a function of time relaxing from a 6 micrometers pre-deflection effect, which depicts the simulated mirror deflection as a function of time relaxing form a 6 micrometers pre-deflection. This interesting phenomenon may exist pervasively in various micro-systems due to its higher area to mass ratio compared to that of the macro-systems. Our simulated result demonstrates that the tandem FPI based spectrometer, in principle, is able to obtain a spectral response with high accuracy from a light source having continuous spectrum.

Paper Details

Date Published: 11 November 1999
PDF: 6 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369368
Show Author Affiliations
Kuo Kang Liu, Nanyang Technological Univ. (Singapore)
Shih Ping Lee, Industrial Technology Research Institute (Taiwan)
Ran-Jin Lin, Industrial Technology Research Institute (Taiwan)
Long Hsu, National Chiao Tung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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