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Proceedings Paper

Testing method for microprofile of optical supersmooth surface
Author(s): Jianbai Li; Shaorong Xiao; Xiaoyun Li; Aihan Ying; Xiaoli Zhang; Anging Zhuo
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Paper Abstract

In this paper, some advantage on testing method for optical supersmooth surface using Atomic Force Microscope (AFM) are presented, and compared with classical interference method. Important applications of AFM for optical technique are introduced in the paper. Some testing results on microprofile and roughness of optical supersmooth surface using AFM method are listed, and it has indicated that result is not obtained with interference method.

Paper Details

Date Published: 11 November 1999
PDF: 6 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369333
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Shaorong Xiao, Nanchang Univ. (China)
Xiaoyun Li, Jiangxi Academy of Sciences (China)
Aihan Ying, Jiangxi Academy of Sciences (China)
Xiaoli Zhang, Jiangxi Academy of Sciences (China)
Anging Zhuo, Jiangxi Academy of Sciences (China)

Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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