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Proceedings Paper

Micro-electro-mechanical fiber optical switches
Author(s): Ai Qun Liu; Franck Alexis Chollet; Anand Krishna Asundi; Jianmin Miao
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Paper Abstract

This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating/mirror switch driven by electrostatic actuator for fiber-optic switching applications. It consists of two banded silicon wafers. One input fiber with a hemispherical lens at its end and three photodetectors are fabricated on the upper wafer. A movable platform with two gratings and one mirror are fabricated on the lower wafer. When the movable platform is at a certain position, the input beam can be split into three beams by the gratings. Details of the grating switching design, theoretical analysis, fabrication and experimental results are presented in this paper.

Paper Details

Date Published: 11 November 1999
PDF: 8 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369330
Show Author Affiliations
Ai Qun Liu, National Univ. of Singapore (Singapore)
Franck Alexis Chollet, National Univ. of Singapore (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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