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Proceedings Paper

Analysis of Mach-Zehnder interferometric micro-opto-electro-mechanical (MOEM) pressure sensor
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Paper Abstract

Combination of Integrated Optics and micro-machining technologies offer immense potential for sensor applications. Small mechanical deformations can often produce considerable changes in optical properties of devices resulting in drastically improved sensitivities. Here we prose and analyze a novel pressure sensor consisting of integrated optic Mach-Zehnder interferometer whose sensing arm is fabricated on a silicon micro-machined diaphragm. The analysis consists of determining the changes in optical output corresponding to the diaphragm deflections due to impressed pressure. Dynamical equations of motion are solved and resulting displacement fields are related to refractive index and optical path length changes of the Mach-Zehnder interferometer. Results can be used to obtain the change in sensitivity due to change sin path length and refractive index variations. The analysis can easily be applied to other MOEM sensor devices like those consisting of micro-machined vibrating cantilevers and bridges controlling optical waveguides, directional couplers or multi-mode-multi-waveguide structures.

Paper Details

Date Published: 11 November 1999
PDF: 8 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369328
Show Author Affiliations
Talabuttala Srinivas, Indian Institute of Science/Bangalore (India)
Prasant Kumar Pattnaik, Indian Institute of Science/Bangalore (India)
T. Badri Narayana, Indian Institute of Science/Bangalore (India)
Ananth Selvarajan, Indian Institute of Science/Bangalore (India)


Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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