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Proceedings Paper

Absolute thickness measurement using automatic fractional fringe order method
Author(s): Minghong Tsai; Ronglong Tian; Hongxin Huang; Masahide Itoh; Toyohiko Yatagai
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Paper Abstract

The use of a broad-band interferometer and its fringe analysis method are presented in which the fractional fringe order method for measuring the absolute thickness. An approximate integer part of the fringe order is estimated by mechanical measurements, and the fractional part is determined by interferometric fringe pattern analysis. The fringe patterns are obtained with a Michelson interferometer by illumination of several selected wavelengths, respectively. The use of the fractional fringe order method can determine accurately more than 2(pi) phase jumps. The influence of wavelength and approximate integer part of fringe order on the measurement accuracy is discussed.

Paper Details

Date Published: 11 November 1999
PDF: 5 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369324
Show Author Affiliations
Minghong Tsai, Univ. of Tsukuba (Japan)
Ronglong Tian, Univ. of Tsukuba (Japan)
Hongxin Huang, Univ. of Tsukuba (Japan)
Masahide Itoh, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)

Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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